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Fabrication of High-Performance Polycrystalline Silicon Thin Film Transistors at Super Low-Temperature and Its New Electrical Characterization Method

Fabrication of High-Performance Polycrystalline Silicon Thin Film Transistors at Super Low-Temperature and Its New Electrical Characterization Method

町田絵美

生駒 : 奈良先端科学技術大学院大学, 2013.3

Thesis / Diss.

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Volume No.

Total: 2
No. Printing year Location Call Number Material ID Circulation class Status Waiting

1

R010036

2

  • [MS]2013

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要旨
要旨
No. Printing year Location Call Number Material ID Circulation class Status Waiting

1

  • Abstract

R010083

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Publication year

2013

Alternative title

高性能多結晶シリコン薄膜トランジスタの超低温作製と新規手法による電子物性評価

Series title

奈良先端科学技術大学院大学物質創成科学研究科博士論文 ; 2013年3月

Note

学位記番号: 博第1141号

学位授与年月日: 2013/3/22

学位の種類: 博士(工学)

学生番号: 1041016

Country of publication

Japan

Title language

English (eng)

Language of texts

English (eng)

Author information

町田, 絵美 (マチダ, エミ)

Subject

TFT

poly-Si

Laser annealing

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