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Thin glass micro-dome structure based microlens fabricated by accurate thermal expansion of microcavities

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dc.contributor.author Aishan, Yusufu
dc.contributor.author Yalikun, Yaxiaer
dc.contributor.author Amaya, Satoshi
dc.contributor.author Shen, Yigang
dc.contributor.author Tanaka, Yo
dc.date.accessioned 2020-08-27T08:55:54Z
dc.date.available 2020-08-27T08:55:54Z
dc.date.issued 2019-12-26
dc.identifier.uri http://hdl.handle.net/10061/14035
dc.description.abstract We present an efficient fabrication technique for a glass microdome structure (GMDS) based on the microthermal expansion principle, by inflating the microcavities confined between two thin glass slides. This technique allows controlling the height, diameter, and shape of the GMDS with a uniformity under 5%. The GMDS has a high potential for the application of the microlens and lens array. This inflated hollow, thin glass structure is stable at extreme environments such as in strong acid and high temperature conditions. More importantly, the hollow microdome can be filled with liquid substances to further extend its applications. To verify our method, various GMDSs were fabricated under different process conditions, at different temperatures (540 °C–600 °C), microcavity diameters (300 μm–600 μm), glass thicknesses (120 μm–240 μm), and microcavity etching depths (25 μm–70 μm). The optical features of “empty” and “filled” microcavities were investigated. An empty microcavity functioned as a reducing lens (0.61×–0.9×) (meniscus lens), while a filled microcavity functioned as a magnifying lens (1.31×–1.65×) (biconvex lens). In addition, both lenses worked in strong acid (sulfuric acid) and high temperature (over 300 °C) conditions in which other materials of lenses cannot be used. ja_JP
dc.language.iso en ja_JP
dc.publisher American Institute of Physics ja_JP
dc.relation.isreplacedby https://aip.scitation.org/doi/10.1063/1.5123186 ja_JP
dc.rights Published under license by AIP Publishing. ja_JP
dc.title Thin glass micro-dome structure based microlens fabricated by accurate thermal expansion of microcavities ja_JP
dc.type.nii Journal Article ja_JP
dc.textversion none ja_JP
dc.identifier.eissn 1077-3118
dc.identifier.jtitle Applied Physics Letters ja_JP
dc.identifier.volume 115 ja_JP
dc.identifier.issue 26 ja_JP
dc.relation.doi 10.1063/1.5123186 ja_JP
dc.identifier.NAIST-ID 74654880 ja_JP


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